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Si crystal cracks limit of soft lithography: Fabrication & processing

โœ Scribed by Jonathan Wood


Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
96 KB
Volume
8
Category
Article
ISSN
1369-7021

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The 2D photonic crystal superprism structures with a triangle array of air holes were designed and fabricated on the polymer slab by soft lithography method. The profile of the molded structures with 450 nm in diameter and 900 nm in lattice constant was examined by SEM. By means of experiment and me