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Si-CMOS-compatible lift-off fabrication of low-loss planar chalcogenide waveguides

✍ Scribed by Hu, Juejun; Tarasov, Vladimir; Carlie, Nathan; Feng, Ning-Ning; Petit, Laeticia; Agarwal, Anu; Richardson, Kathleen; Kimerling, Lionel


Book ID
115408031
Publisher
Optical Society of America
Year
2007
Tongue
English
Weight
175 KB
Volume
15
Category
Article
ISSN
1094-4087

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