✦ LIBER ✦
Si atomic layer epitaxy based on Si2H6 and remote He plasma bombardment
✍ Scribed by A. Mahajan; J. Irby; D. Kinosky; R. Qian; S. Thomas; S. Banerjee; A. Tasch; T. Picraux
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 446 KB
- Volume
- 225
- Category
- Article
- ISSN
- 0040-6090
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