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Sheet-shaped ECR plasma generation using permanent magnets for material processing

✍ Scribed by Kiyotaka Nakase; Tetsuji Shibata; Toshiaki Yasui; Hirokazu Tahara; Takao Yoshikawa

Book ID: 113205284
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 421 KB
Volume: 281-282
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(96)08598-7

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