Sheath structure and ion current onto a patterned surface immersed in a plasma at floating potential

✍ Scribed by Boris Briehl; Herbert M. Urbassek

• Book ID: 108423113
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 948 KB
• Volume: 160
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/s0257-8972(02)00410-3