Shape optimization and dynamic characterization of multiple-electrostatically deformable microbridges

✍ Scribed by Yunqiang Li; Packirisamy Muthukumaran; Rama B. Bhat

• Publisher: Springer-Verlag
• Year: 2006
• Tongue: English
• Weight: 572 KB
• Volume: 13
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-006-0290-0