๐”– Bobbio Scriptorium
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Shape of gaskets for valve gates

โœ Scribed by S. V. Seinov; V. A. Kalashnikov; B. P. Zheleznov; M. B. Zhitomirskii


Publisher
Springer
Year
1986
Tongue
English
Weight
249 KB
Volume
22
Category
Article
ISSN
0009-2355

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This invention relates to a seal assembly for use in equipment in the electronics manufacturing industry that has a replaceable barrier to shield an elastomeric seal from direct exposure to a plasma. Commercially available seal and barrier shield assemblies comprise a bonded rubber seal and a contin