Shape modifications of self-organised colloidal silica nanomasks on silicon

✍ Scribed by J.K.N. Lindner; B. Gehl; B. Stritzker

• Book ID: 103860736
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 277 KB
• Volume: 242
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2005.08.067