Shape measurement of workpiece surface with zone-plate interferometer during machine running

✍ Scribed by Takashi Nomura; Hiroshi Miyashiro; Kazuhide Kamiya; Kazuo Yoshikawa; Hatsuzo Tashiro; Masane Suzuki; Masao Usuki; Fumio Kobayashi

• Book ID: 103532071
• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 948 KB
• Volume: 15
• Category: Article
• ISSN: 0141-6359
• DOI: 10.1016/0141-6359(93)90342-8