✦ LIBER ✦
Shallow junctions, silicide requirements and process technologies for sub 0.5 μm CMOS: Invited review paper
✍ Scribed by Bijan Davari
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 440 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0167-9317
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