✦ LIBER ✦
Shadowed sputtering of gold on V -shaped microtrenches etched in silicon and applications in microfabrication
✍ Scribed by Younan Xia; Prof. George M. Whitesides
- Publisher
- John Wiley and Sons
- Year
- 1996
- Tongue
- English
- Weight
- 711 KB
- Volume
- 8
- Category
- Article
- ISSN
- 0935-9648
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