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Serial cosputtering of mixed Al/Zr and Al2O3/ZrO2 films

✍ Scribed by A. Belkind; R. Laird; Z. Orban; P. White Rafalko

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 492 KB
Volume: 219
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(92)90722-n

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