✦ LIBER ✦

Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator

✍ Scribed by Takefumi Kanda; Minoru K. Kurosawa; Toshiro Higuchi

Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 366 KB
Volume: 40
Category: Article
ISSN: 0041-624X
DOI: 10.1016/s0041-624x(02)00091-4

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✦ Synopsis

In this paper, an improved touch probe sensor device for higher sensitivity and low contact force is reported. In order to improve the resolution, we have evaluated the sensitivity and fabricated a miniaturized sensor. The sensor transducer was 3 mm long and had higher resonance frequency. The resonance frequency of the vibrator was 937 kHz. Evaluated sensitivity was 1.0 x 10(-1) mV/nm. This value equals five times larger than that of a previous sensor. Miniaturization of the sensor device carried smaller vibration operation and higher sensitivity.