✦ LIBER ✦
Sensitivity enhancement of α-methylstyrene copolymer electron beam resists by force development
✍ Scribed by Kazuyuki Sugita; Nobuo Ueno; Michimasa Funabashi; Shuichi Saito; Shiro Nagata; Shigeru Sasaki
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 622 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0032-3861
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