Sensitivity comparison between gas sensors using SAW and shear horizontal plate-mode oscillators

Acoustic wave devices to measure gas flo

Acoustic wave devices to measure gas flow: Comparison between surface acoustic wave (SAW) and shear horizontal acoustic plate mode (SH-APM) oscillators

✍ Dominique Rebière; Corinne Déjous; Jacques Pistré; Jean-Louis Aucouturier; Colet 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 432 KB

In recent years there has been growmg Interest m usmg acoustic waves for a broad spectrum of physical and chenucal sensor applications In this paper we describe two types of acoustic flow sensors For both devices, mterdlgltal transducers (IDTs) on a plezoelectrlc substrate have been used to realize