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Sensitivity analysis of scanning near-field optical microscope probe

✍ Scribed by Te-Hua Fang; Win-Jin Chang

Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
271 KB
Volume
35
Category
Article
ISSN
0030-3992

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✦ Synopsis

In this paper, we study the dynamic modes of a scanning near-ΓΏeld optical microscope (SNOM) which uses an optical ΓΏber probe; and the sensitivity of exural and axial vibration modes for the probe were derived and the closed-form expressions were obtained. According to the analysis, as expected each mode has a di erent sensitivity and the ΓΏrst mode is the most sensitive mode of exural and axial vibration for the SNOM probe. The sensitivities of both exural and axial modes are greater for a material surface that is compliant with the cantilever probe. As the contact sti ness increases, the high-order vibration modes are more sensitive than the lower-order modes. Furthermore, the axial contact sti ness has a signiΓΏcant e ect on the sensitivity of the SNOM probe, and this should be noted when designing new cantilever probes.

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