✦ LIBER ✦
Semiconductor Materials. Analysis and Fabrication Process Control. Proceedings of Symposium D of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5 1992 : Elsevier, Amsterdam, 1993 (ISBN 0-444-89908-1). xiv + 338 pp. Price US$ 215.50/Dfl. 345.00.
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 100 KB
- Volume
- 281
- Category
- Article
- ISSN
- 0003-2670
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