✦ LIBER ✦
Semiconductor applications of focused ion beam micromachining : D. C. Shaver and B. W. Ward. Solid St. Technol., 73 (December 1985)
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 249 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0026-2714
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