Semianalytical description of nonlocal secondary electrons in a radio frequency capacitively coupled plasma at intermediate pressures

✍ Scribed by Berezhnoi, S.V.; Kaganovich, I.D.; Misina, M.; Bogaerts, A.; Gijbels, R.

• Book ID: 114558835
• Publisher: IEEE
• Year: 1999
• Tongue: English
• Weight: 244 KB
• Volume: 27
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/27.799810