✦ LIBER ✦
Semi-empirical and practical model for low-electric field direct tunneling current estimation in nanometer-thick SiO2films
✍ Scribed by Hiroshi Nakatsuji; Akira Shimizu; Yasuhisa Omura
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 130 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0749-6036
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✦ Synopsis
This paper describes a simplified model of the direct tunneling current characteristics of thin SiO 2 films. The theoretical direct tunneling current calculations take into account the dark space at the Si/SiO 2 interface in a simple manner. Theoretical curves comparatively well reproduce experimental results in low gate voltages.