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SEM study of etching of GaAs substrates in the H3PO4:H2O2:H2O system : M. P. Sinha and S. Mahapatra. Microelectron. J. 18 (2), 48 (1987)

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 122 KB
Volume: 27
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(87)90854-7

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