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SEM characterization of multilayer structures

✍ Scribed by NN Dremova; EB Yakimov

Book ID
103472169
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
257 KB
Volume
42
Category
Article
ISSN
0042-207X

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Investigation of gallium arsenide multil
Investigation of gallium arsenide multilayer structures using a tunnelling microscope combined with a UHV-SEM
✍ O. Albrektsen; H. Salemink πŸ“‚ Article πŸ“… 1990 πŸ› John Wiley and Sons 🌐 English βš– 440 KB

## Abstract Analysis of semiconductor multilayers in an ultrahigh vacuum (UHV) environment is performed using a tunnelling microscope built into a UHV‐SEM with an Auger facility. The GaAs (110) surface is investigated with tunnelling spectroscopy and topography. As this cleavage plane is perpendicu