Self-structuring of buried SiO2 precipitate layers during IBS: A computer simulation

✍ Scribed by Stefan Reiss; Karl-Heinz Heinig

• Book ID: 113287267
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 501 KB
• Volume: 112
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(95)01238-9