✦ LIBER ✦
Self-organized vertically aligned single-crystal silicon nanostructures with controlled shape and aspect ratio by reactive plasma etching
✍ Scribed by Xu, S.; Levchenko, I.; Huang, S. Y.; Ostrikov, K.
- Book ID
- 111652097
- Publisher
- American Institute of Physics
- Year
- 2009
- Tongue
- English
- Weight
- 641 KB
- Volume
- 95
- Category
- Article
- ISSN
- 0003-6951
No coin nor oath required. For personal study only.