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Self-organization and nanostructure formation in chemical vapor deposition

โœ Scribed by Walgraef, Daniel


Book ID
121337889
Publisher
The American Physical Society
Year
2013
Tongue
English
Weight
308 KB
Volume
88
Category
Article
ISSN
1063-651X

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SiC nanostructured coatings were deposited using a novel synthesis process combining chemical vapor deposition (CVD) with nanoparticle impaction. Indentation moduli (โˆผ 370 GPa) were similar to and hardnesses (โˆผ 39 GPa) exceeded the best commercially grown CVD films. Furthermore, film fracture toughn