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Self-limiting MBE growth and characterization of three-dimensionally confined nanostructures on patterned GaAs (311)A substrates

✍ Scribed by Zhichuan Niu; Richard Nötzel; Uwe Jahn; Hans-Peter Schönherr; Jörg Fricke; Klaus H. Ploog


Book ID
107457990
Publisher
Springer US
Year
1999
Tongue
English
Weight
416 KB
Volume
28
Category
Article
ISSN
0361-5235

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Selective growth of GaAs nanostructures
✍ A. Tukiainen; J. Tommila; A. Aho; A. Schramm; J. Viheriälä; R. Ahorinta; M. Dumi 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 833 KB

We report a comparative study on selective epitaxy of nanostructures with different geometrical shapes. GaAs pyramids were grown by molecular beam epitaxy into circular holes, L-shaped holes, and cross-shaped holes, patterned using nanoimprint lithography. These GaAs nanostructures were used for gui