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Self-limiting growth of ZrO2films on a Si(100) substrate using ZrCl4and O2under atmospheric pressure

✍ Scribed by Naoyuki Takahashi; Naoki Yoshii; Shinichi Nonobe; Takato Nakamura; Masayuki Yoshioka


Book ID
107452972
Publisher
Springer US
Year
2003
Tongue
English
Weight
177 KB
Volume
32
Category
Article
ISSN
0361-5235

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