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Self-limiting formation of silicon-nitride monolayer on Si(1 1 1) surface using N2/H2 mixture gas

✍ Scribed by Yukinori Morita; Takao Ishida; Hiroshi Tokumoto

No coin nor oath required. For personal study only.

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Self-limiting formation of silicon-nitride monolayer on Si(1&#xa0;1&#xa0;1) surface using N2/H2 mixture gas