✦ LIBER ✦
Self-consistent particle simulation of three-dimensional dc magnetron discharge
✍ Scribed by K Nanbu; S Segawa; S Kondo
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 355 KB
- Volume
- 47
- Category
- Article
- ISSN
- 0042-207X
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