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Self-Cleaning Properties of TiO2 Films Deposited by Reactive Magnetron Sputtering Using Smooth D.C. and Pulsed D.C. Source

โœ Scribed by Pudwat, S.; Rakkwamsuk, P.; Damrongrattana, S.

Book ID
120388521
Publisher
Trans Tech Publications, Ltd.
Year
2008
Tongue
English
Weight
631 KB
Volume
55-57
Category
Article
ISSN
1662-8958

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XPS study of polycrystalline and epitaxial FeTaN films deposited by d.c. reactive magnetron sputtering
โœ Yang, Dehua; Jiang, Hai; Ott, Ronald; Minor, Kevin; Grant, Jonathan; Varga, Lajo ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 249 KB ๐Ÿ‘ 2 views

Thin รlms of FeTaN have been investigated as potential head materials for several years. However, little information related to its chemical characteristics can be found in the literature, therefore polycrystalline and epitaxial FeTaN รlms were synthesized by d.c. reactive magnetron sputtering. Foll