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Self-Assembly of a Diblock Copolymer on a Patterned Surface with Low-Energy Electron Beam

✍ Scribed by Kim, Chang Ok; Kim, Duk Hoe; Kim, Jung Sook; Park, Joon Won


Book ID
126964145
Publisher
American Chemical Society
Year
2006
Tongue
English
Weight
344 KB
Volume
22
Category
Article
ISSN
0743-7463

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Using a multi-sector ion-surface scattering mass spectrometer, reagent ions of the general form SiR(3) (+) were mass and energy selected and then made to collide with a hydroxy-terminated self-assembled monolayer (HO-SAM) surface at energies of approximately 15 eV. These ion-surface interactions res