✦ LIBER ✦
Self-assembled titanium calcium oxide nanopatterns as versatile reactive nanomasks for dry etching lithographic transfer with high selectivity
✍ Scribed by Faustini, Marco ;Drisko, Glenna L. ;Letailleur, Alban A. ;Montiel, Rafael Salas ;Boissière, Cédric ;Cattoni, Andrea ;Haghiri-Gosnet, Anne Marie ;Lerondel, Gilles ;Grosso, David
- Book ID
- 120880684
- Publisher
- The Royal Society of Chemistry
- Year
- 2013
- Tongue
- English
- Weight
- 495 KB
- Volume
- 5
- Category
- Article
- ISSN
- 2040-3364
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