Self-Assembled Si Quantum-Ring Structures on a Si Substrate by Plasma-Enhanced Chemical Vapor Deposition Based on a Growth-Etching Competition Mechanism

✍ Scribed by L. W. Yu; K. J. Chen; J. Song; J. Xu; W. Li; H. M. Li; M. Wang; X. F. Li; X. F. Huang

• Publisher: John Wiley and Sons
• Year: 2007
• Tongue: English
• Weight: 538 KB
• Volume: 19
• Category: Article
• ISSN: 0935-9648
• DOI: 10.1002/adma.200602804