Self-Assembled Octadecyltrimethoxysilane Monolayers Enabling Selective-Area Atomic Layer Deposition of Iridium

✍ Scribed by E. Färm; M. Kemell; M. Ritala; M. Leskelä

• Publisher: John Wiley and Sons
• Year: 2006
• Tongue: English
• Weight: 210 KB
• Volume: 12
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/cvde.200604219