Self-assembled nanolayers as interfacial diffusion barriers for thermally stable and low contact resistance Cu source/drain electrode ina-Si:H TFT-LCDs

✍ Scribed by Jung Suk Han; Chiyoung Lee; Jaegab Lee

• Book ID: 107702343
• Publisher: The Korean Institute of Metals and Materials
• Year: 2012
• Tongue: English
• Weight: 382 KB
• Volume: 8
• Category: Article
• ISSN: 1738-8090
• DOI: 10.1007/s13391-011-1092-9