Self-assembled interconnection by bamboo-like carbon nanotubes

✍ Scribed by Sung-Hoon Kim; Jung-Chul Park; Beomjin Kim; Sang Kuk Lee; Dong Uk Kim; Young-Hun Kim

• Book ID: 103844774
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 213 KB
• Volume: 24
• Category: Article
• ISSN: 0928-4931
• DOI: 10.1016/j.msec.2003.09.028

✦ Synopsis

Carbon nanotubes (CNTs) could be formed on Si substrate using nickel catalyst under microwave plasma-enhanced chemical vapor deposition system. Under the high, negative-bias voltage ( À 400 V) condition, we found the formation of the carbon nanotube islands and the bamboo-like carbon nanotube interconnection lines. Most of the bamboo-like carbon nanotubes connected with the carbon nanotubes themselves, which indicates the self-assembled characteristics of the carbon nanotube interconnection lines. The self-assembled characteristics of the bamboo-like carbon nanotube interconnection lines were evaluated using computer-aided image analysis.