Self-annealing in ion-implanted Si and GaAs : F. S. Komarov. Vacuum42(1/2), 101 (1991)

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 129 KB
• Volume: 32
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(92)90252-g