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Self-Alignment of Patterned Wafers Using Capillary Forces at a Water–Air Interface

✍ Scribed by B. R. Martin; D. C. Furnange; T. N. Jackson; T. E. Mallouk; T. S. Mayer


Publisher
John Wiley and Sons
Year
2001
Tongue
English
Weight
244 KB
Volume
11
Category
Article
ISSN
1616-301X

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