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Self-aligning resist techniques for shadow evaporation of a superconducting three-terminal device

✍ Scribed by P. Van den Hamer; E.A. Montie; P.B.L. Meijer


Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
805 KB
Volume
3
Category
Article
ISSN
0167-9317

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