✦ LIBER ✦
Self-aligned vertical double-gate MOSFET (VDGM) with the oblique rotating ion implantation (ORI) method
✍ Scribed by Ismail Saad; Razali Ismail
- Book ID
- 103833599
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 345 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0026-2692
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