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Self-Aligned Top-Gate Coplanar a-Si:H Thin-Film Transistors With a $\hbox{SiO}_{2}$–Silicone Hybrid Gate Dielectric

✍ Scribed by L. Han; Y. Huang; J. C. Sturm; S. Wagner

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Low voltage operation a-Si:H thin film t

✍ Guglielmo Fortunato; Luigi Mariucci; Carlo Reita; Piero Foglietti 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 174 KB

Self-Aligned Top-Gate Coplanar a-Si:H Thin-Film Transistors With a $\hbox{SiO}_{2}$&#x2013;Silicone Hybrid Gate Dielectric