Self-aligned NiSi2 electrode fabrication by MBE and its application to etched-groove Permeable Base Transistor (PBT)

✍ Scribed by T. Ohshima; K. Nakagawa; N. Nakamura; Y. Shiraki

• Book ID: 103162869
• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 301 KB
• Volume: 95
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(89)90450-8