✦ LIBER ✦
Self-aligned nickel-mono-silicide technology for high-speed deep submicrometer logic CMOS ULSI
✍ Scribed by Morimoto, T.; Ohguro, T.; Momose, S.; Iinuma, T.; Kunishima, I.; Suguro, K.; Katakabe, I.; Nakajima, H.; Tsuchiaki, M.; Ono, M.; Katsumata, Y.; Iwai, H.
- Book ID
- 118265236
- Publisher
- IEEE
- Year
- 1995
- Tongue
- English
- Weight
- 777 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0018-9383
No coin nor oath required. For personal study only.