✦ LIBER ✦
Selective XPS technique for analysis of submicrometer metal line sidewalls on semiconductor devices
✍ Scribed by Eric J. White
- Publisher
- John Wiley and Sons
- Year
- 1989
- Tongue
- English
- Weight
- 411 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0142-2421
No coin nor oath required. For personal study only.