✦ LIBER ✦
Selective wet etching of InGaAs∕InGaAsP in HCl∕HF∕CrO[sub 3] solution: Application to vertical taper structures in integrated optoelectronic devices
✍ Scribed by Huang, Hui; Wang, Xingyan; Ren, Xiaomin; Wang, Qi; Huang, Yongqing
- Book ID
- 127118687
- Publisher
- AVS (American Vacuum Society)
- Year
- 2005
- Tongue
- English
- Weight
- 923 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0734-211X
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