Selective tungsten deposition into ordered nanohole arrays of anodic porous alumina by electron-beam-induced deposition

✍ Scribed by G.Q. Xie; M. Song; K. Mitsuishi; K. Furuya

• Book ID: 106019569
• Publisher: Springer
• Year: 2004
• Tongue: English
• Weight: 434 KB
• Volume: 79
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-004-2926-1