✦ LIBER ✦

Selective nitride: Oxide anisotropic etch process

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Selective nitride: Oxide anisotropic etc

📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 79 KB

Tegal doubles selectivity of nitride etc

✍ Keith Holman 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 252 KB

Selective etching of boron nitride phase

✍ Sachdev, H.; Strauß, M. 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 569 KB

Selective etching/plating process

📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 572 KB

RF plasma selective etching of boron nit

✍ Werbowy, A.; Szmidt, J.; Sokołowska, A.; Mitura, S. 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 661 KB

Fluorination Induced Etching Selectivity

✍ Zhang, R. Q.; Zhang, Dongju; Zhao, Y. L.; Lee, S. T. 📂 Article 📅 2004 🏛 American Chemical Society 🌐 English ⚖ 240 KB