Selective metalorganic chemical vapor deposition growth of GaAs on AlGaAs combined with in situ HCl gas etching

✍ Scribed by Hirotaka Kizuki; Norio Hayafuji; Nariaki Fujii; Nobuaki Kaneno; Yutaka Mihashi; Toshio Murotani

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 661 KB
• Volume: 134
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(93)90006-i