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Selective growth of carbon nanotube for via interconnects by oxidation and selective reduction of catalyst

✍ Scribed by Lee, Sunwoo; Moon, Seongho; Yoon, Hong Sik; Wang, Xiaofeng; Kim, Dong Woo; Yeo, In-Seok; Chung, U-In; Moon, Joo-Tae; Chung, Jaegwan

No coin nor oath required. For personal study only.

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