✦ LIBER ✦
Selective germanium epitaxial growth on silicon using CVD technology with ultra-pure gases
✍ Scribed by Kobayashi, Shin-ichi; Cheng, Min-Lin; Kohlhase, Armin; Sato, Taketoshi; Murota, Junichi; Mikoshiba, Nobou
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 265 KB
- Volume
- 99
- Category
- Article
- ISSN
- 0022-0248
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